OVERVIEW
Our range of products addresses the requirements of multiple industries, from cutting tools to electronics manufacturing, all of which benefit from diamond's inherent characteristics, such as strength, durability, stiffness, chemical inertness, thermal conductivity and electrical isolation properties.
sp3 is unique in its ability to manufacture and market diamond solutions, whether you need to strengthen a cutting tool, or cool the junction temperature of a high heat flux device, based on its wafer scale and thick-film manufacturing processes. A demonstrated market leader, sp3 sells both the equipment to manufacture diamond and a broad range of products that allow you to take advantage of the properties of diamond.
DiaBide™ - CARBIDE CUTTING TOOL DIAMOND COATINGS
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sp3 Diamond Technologies' DiaBide™ thin-film CVD diamond coating enables super-hard diamond-coated carbide cutting tools and wear parts.
The DiaBide™ coating process produces cutting tools with a significantly longer wear life, and considerably less friction than traditional cutting tools, so much so that DiaBide™ coated tools quickly pay for themselves.
The proliferation of super-hard composite materials across many industries has created a huge demand for diamond coated cutting tools. sp3 Diamond Technologies' CVD diamond reactors are optimally suited to cutting tool applications. Coatings can be applied to tungsten carbide inserts, drills, endmills and a wide variety of specialized tools. The diamond coated tools are ideal for machining graphite, green ceramic, fiber reinforced plastics, carbon fiber composites, metal matrix composites and aluminum die castings with high silicon content.
sp3 specializes in depositing CVD diamond on flat and round cutting tools of many configurations, using thin-film diamond. Diamond tools provide exceptional performance in machining abrasive, non-metallic materials such as metal matrix composites and non-ferrous metals.
Because diamond tools last much longer (10 to 50 times the life of carbide) they:
- Improve the dimensional accuracy and consistency of the machined parts
- Greatly reduce the number of tool changes, increasing productivity
- Increase machine utilization
- Allow much longer periods of unattended machining, e.g., overnight
Because diamond tools offer extremely low friction and consistently sharp edges, they:
- Permit using speeds two to three times higher than carbide, again contributing to productivity, with no degradation of surface quality
- Allow delicate, thin-wall sections to be machined quickly and precisely at high rpm settings with reduced feed rates
sp3 Diamond Technologies' patented DiaBide™ hot-filament CVD deposition process allows uniform coating of substrates of almost any configuration. With its considerable expertise, sp3 has developed a method that maximizes the number of tools that are coated in every reactor run to make its DiaBide™ coating as cost-effective as possible. With its economical operation and low power consumption, sp3's hot filament reactors can produce the lowest cost diamond coatings on the market.
The Type System
sp3 Diamond Technologies knows diamond coatings and their impact on overall tool performance. sp3 will work with its coating service clients to define a coating/substrate system that will best address the needs of the end-user application. Selecting the proper tungsten carbide substrate is extremely important to achieving good coating adhesion and therefore tool integrity and reliability. The proper selection of coating options enables the end user to achieve the optimum combination of cutting performance and tool life.
sp3 Diamond Technologies' thin-film CVD diamond coating types address different work piece material needs as follows:
Round/Rotary Tool Coatings
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Flat Tool Coatings
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Type 3 is a thin diamond coating approximately 6 microns thick. It is typically used in applications where edge sharpness is required to optimize finish or reduce the possibility of tear-out. Because the coating is thinner, tool life will be somewhat less than with the Type 5 coating. The Type 3 is also used on those carbide grades that are not well suited for thicker coatings because of high Cobalt content (10% or greater) or small grain size (0.8 micron or less).
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Type 10 is a thin diamond coating approximately 12 microns thick. It is typically used in applications where edge sharpness is required to optimize finish or reduce the possibility of tear-out. Because the coating is thinner, tool life will be somewhat less than with the Type 15 or Type 18 coating. The Type 10 is also used on those carbide grades that are not well suited for thicker coatings because of high Cobalt content (10% or greater) or small grain size (0.8 micron or less).
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Type 5 is the general-purpose coating, nominally 12 microns thick. It is recommended for moderately abrasive applications and provides excellent tool life. A proprietary process guarantees adhesion of the diamond coating on selected carbides, even in the most demanding applications. This coating provides excellent tool life when machining graphite, green ceramic, some fiber-reinforced composites and Aluminum alloys with <10% Silicon.
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Type 15 is a thicker coating, nominally 20 microns thick. It is recommended for mild to moderately abrasive applications and provides good tool life. A proprietary preparation process guarantees adhesion of the diamond coating on selected carbides, even in the most demanding applications. This coating provides good tool life when machining carbon, graphite, green ceramics, some fiber-reinforced plastics, copper and brass, free machining Aluminum alloys and cast Aluminum alloys with <10% silicon.
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Type 7 is the most robust and thickest coating offered by sp3 Diamond Technologies. Typically this coating will be 20 microns thick and because of this will have reduced edge sharpness. sp3 is the only supplier of diamond coatings to produce a coating this thick. This product performs well in fiber and glass filled composite materials, carbon fiber reinforced plastics, Aluminum alloys with >10% Silicon and Metal Matrix Composites (MMC). The demands that the Type 7 coating places on the diamond/carbide interface require some special attention to the choice and specifications of carbide grades.
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Type 18 is the most general–purpose diamond coating offered by sp3 Diamond Technologies. It is recommended for moderate to highly abrasive applications and provides excellent tool life. Typically this coating will be 30 microns thick, and because of this will have slightly reduced edge sharpness. This product provides excellent tool life in fiber and glass filled composite materials, carbon fiber reinforced plastics, cast Aluminum alloys with >10% Silicon and metal matrix composites (MMC). The demands that the Type 18 coating places on the diamond/carbide interface require some special attention to the choice and specifications of carbide grades. sp3's proprietary substrate preparation process assures coating integrity and reliable cutting performance.
sp3 can provide diamond coatings up to 50um thick on inserts for more demanding applications. Consult sp3 if you have an application that may require a thicker coating.
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Notes: Endmills are coated down the entire flute length (up to 3 inches maximum). Drills are coated from two to five diameters down the flute. sp3 does not coat both ends of double-ended tools. Maximum overall length of tools to be coated is 8 inches. sp3's CVD diamond coating can be applied to virtually any round tool geometry including tools with steps. Tools from .010” diameter to 2.50” diameter can be coated. Consult sp3 Diamond Technologies for coating endmills with a larger shank diameter than the cutting diameter or other special tools. Brazed tools cannot be coated.
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Notes: Diamond coatings can be applied to virtually any insert style, size or geometry. Rounds, squares, triangles, trapezoids and diamond-patterned tungsten carbide inserts can all be coated. The diamond coating is highly conformal and very uniform in thickness and therefore suitable for coating chip breaker style inserts. Grooving and parting tools of any size or shape can be coated as can single point engraving tools. Tungsten carbide saw blades can also be coated. These can be up to 3-inches in diameter and as thick as ¼-inch. Saws 1 mm thick and thicker will not warp or distort. Saw blades less than 1mm thick may distort as much as .005 inches.
sp3 only coats one side of each tool. This avoids potential damage to the cutting edge on double-sided tools when the tool is clamped into a tool holder. Some grooving tools with the cutting edges on the same side can have the coating applied to both cutting tips. Contact sp3 for more information on specific geometries.
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Carbide Substrate:
Tools to be coated must be fabricated from a carbide grade that is compatible with sp3's CVD diamond coating processes. This is necessary to assure reliable adhesion of the coating to the carbide substrate, which in turn assures tool reliability. A list of approved grades for which sp3 has developed compatible processes appears in our "Downloads" section. Please consult with sp3 before sending tools made from other grades for service coating.
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CVD Diamond Frequently Asked Questions
What is diamond?
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Diamond is composed of pure carbon atoms, arranged in a very special crystal orientation that gives it its unique physical properties. The key element that allows for the special crystal structure is the “sp3” bonding of the carbon atoms—this is where the “sp3” in our company name comes from.
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What materials are best suited to machining with diamond?
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Abrasive non-metallic materials, non-ferrous metals, and abrasive non-ferrous metals.
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Why can’t you machine ferrous metals with diamond?
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Diamond is unaffected by almost every other chemical or compound in nature. One exception is hot iron. The carbon atoms in diamond will dissolve into the iron, quickly eroding the diamond surface. Iron wheels are actually used to polish natural diamond. However, under certain conditions and with certain cooling substances, it’s possible and even desirable to machine ferrous materials using diamond. Contact sp3 Diamond Technologies, Inc. for more details.
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How thick is the CVD diamond film on sp3 DiaBide™ tools?
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Thickness is tailored to the application, and can range from 5 to 50 microns.
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How do coating thicknesses in microns relate to inches?
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1 micron is 1 millionth of a meter, or 0.00004 inch. Thus, a coating thickness of 10 microns is 0.0004 inch; 40 microns is 0.0016 inch.
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How does sp3 grow CVD diamond?
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The diamond coating is grown in a vacuum chamber using feed gases of hydrogen and methane. Usually the gases are fed into the chamber in a 50:1 mix, predominantly hydrogen. A very high temperature element in the chamber causes the deposition process to take place.
sp3 uses fine filaments energized to a temperature of approximately 2200°C. The high temperature breaks down the methane into carbon and hydrogen. The carbon atoms will nucleate and grow tiny crystals of diamond. In time these tiny diamond crystallites will grow into a continuous diamond film.
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How long does it take to coat a tool with CVD diamond?
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Diamond grows slowly, about 0.5 to 1.0 micron per hour. A typical reactor run to grow 40 micron films on cutting inserts can take almost two days; most round/rotary tools are coated overnight.
Because of the slow diamond growth rate, sp3 finds ways to maximize the number of tools that are coated in every reactor run.
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How many tools can be coated in a reactor?
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Our reactors provide a uniform diamond coating over an area of about a square foot. This enables coating 200 to 300 inserts at a time, or 65 to 100 round tools.
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How do you make the CVD diamond coating stick?
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Left to itself, diamond has almost no chemical bond to cemented carbides. The trick is to pretreat the carbide surface, roughening it so the diamond can grow into the surface and attach itself through the mechanical interlocking of the carbide and the diamond.
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How sharp is the cutting edge on a diamond-coated tool?
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The coating will naturally tend to round the edge somewhat. Sharpness is a function of the sharpness of the uncoated tool and the thickness of the film. Thin (10 micron) films over a dead sharp edge are still quite sharp. Thicker films, e.g., 40 microns, will approach an “A” hone in sharpness.
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Custom Coating
What carbide grades can be coated with CVD diamond?
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This can’t be answered in just a few words! In general, typical C-2, medium grain (1-3um) carbides with a 6% cobalt binder amount are the best candidates. For complete lists, please refer to our “Downloads” section at www.sp3diamondtech.com
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Can sp3 coat micro-grain carbides?
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We can coat select micro-grain (0.5-1um) carbides with a 10% cobalt binder amount, but only on round tools with diameters < or = .093”. If the carbide is too fine it does not respond to the preparation, which requires a rough surface for good adhesion.
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If I send sp3 a tool, can they coat it?
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If the tool is in an approved carbide grade and the geometry is within our limits, sp3 can coat it! Please contact Customer Service at 877-773-9940 with specific questions.
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If I send sp3 a tool in an acceptable grade for coating, how long will it take?
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We can typically turn around custom coating requests in about 10 working days.
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Can tools coated with other coatings such as TiC and TiN be coated with CVD diamond?
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Unfortunately not. sp3 needs a bare carbide tool of an approved grade to insure a successful bond between the diamond and the carbide.
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Can tools be diamond coated a second time?
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sp3 does not coat tools that have already had a diamond coating for two reasons. The first is that the diamond deposition process alters the carbide at the surface, and the required surface preparation will be less predictable a second time.
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Can high speed steel tools be coated?
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The substrate temperature is about 850°C during the deposition. High speed steel will not survive these high temperatures.
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Can tools with brazed carbide tips be coated?
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The normal deposition temperature is 850°C. Typical brazing will not survive these high temperatures.
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Can you braze diamond-coated tools?
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This is feasible if the braze is done in a non-oxidizing atmosphere such as argon, and temperatures are kept as low as possible. However, one consideration is that the tool cannot be touched up or ground to size after brazing. You would be grinding a thin diamond film, and it would be very difficult to grind accurately without the possibility of breaking through the film.
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Machining with CVD Diamond Tools
Can I expect longer tool life with CVD diamond than carbide and, if so, how much longer?
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Yes, you can. How much longer depends a great deal on the application. In very abrasive metals such as 390 aluminum, a 10x life increase in not uncommon. In graphite, lifetime increases between 30x and 50x are common. In glass fiber-filled materials 30x is common.
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What are some other advantages of CVD diamond?
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Accuracy: The diamond coating is very thin, but very hard, and tools don’t change significantly in size during their life. For instance, the radius on an endmill will change by about 10 microns (0.0004″) from when new to the point that it is worn out.
Speed: Diamond tools can typically be run at two to three times the surface speed of carbide tools.
Dry cutting: Diamond tools can often convert an operation from wet to dry machining, providing a significant saving in overall machining costs.
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Should you use coolant with CVD diamond tools?
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Diamond tools can often be run dry. In some cases coolant can shorten tool life due to thermal shock.
If coolant is used for chip removal, it can provide a better finish in some applications. Coolant also contributes some lubricity which can be helpful in some applications.
In general, we recommend to try running dry or with mist coolant. Use flood coolant only when chip removal or finish demands it.
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How do CVD diamond-coated tools perform with respect to surface finish?
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The application of a diamond film to a tool has the effect of making the tool less sharp. What is the consequent effect on surface finish?
First, the question must be asked—what do we mean by finish? Is it an Ra reading using a profilometer, or is it surface sheen or brilliance that is important?
In terms of an Ra reading, CVD diamond tools often provide a finish similar to carbide or PCD tools.
With respect to visual finish, diamond films are composed of millions of tiny crystals, which will cause micro scratches on the surface of some materials, leaving a matte finish rather than a mirror finish. If a particular finish is required, we usually suggest PCD or TFd tools, which are available from sp3 Cutting Tools in Decatur, IN (www.sp3cuttingtools.com).
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“Thick” Film, “Thin” Film and DLC
What is the difference between DLC and CVD diamond coatings?
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DLC is an amorphous carbon film called Diamond Like Carbon. It is not diamond because it is not crystalline. DLC films are typically 1 to 2 microns thick, and do not hold up in very abrasive materials such as silicon aluminum. In graphite they will typically last about 10 to 15% of the life of a diamond tool.
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What is the difference between sp3’s freestanding (“thick-film”) diamond and sp3’s CVD (“thin- film”) diamond coating?
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sp3’s freestanding diamond is grown at our facility in Calgary, Canada using DC torch reactors. It’s referred to as “thick-film” because the thickness can range from 300um to 500um. sp3’s thin-film CVD diamond is grown at our headquarters in Santa Clara, CA in our proprietary hot filament CVD diamond deposition systems. It’s referred to as “thin-film” because the thickness can range from .5um to 50um.
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What substrates can you grow sp3’s thin-film CVD diamond coating on?
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sp3 Diamond Technologies, Inc. has experience coating tungsten carbide, silicon, silicon carbide, titanium, and graphite.
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For additional information, Contact us.
DiaTip™ - INSERT & CARTRIDGE TOOL TIPS
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sp3 Diamond Technologies has commercialized free-standing diamond in its DiaTip™ tool inserts, to bring the wear and durability of diamond to the cutting tools market with an extremely low cost of ownership.
sp3 Diamond Technologies' DiaTips™ enable unparalleled performance thanks to the company's vast polishing and laser fabrication technology for free-standing diamond. DiaTip™ consists of a cutting edge of pure diamond with no binder, eliminating chemical interaction with coolant or workpiece material to prevent premature failure due to edge erosion. DiaTip™'s benefits include two to three times the wear of PCD, longer lasting edge sharpness offering a smoother and more consistent finish, higher thermal conductivity that enables lower cutting temperatures, and reduced cutting force to reduce spindle power.
DiaTip™ is ideal for the following applications:
- Silicon aluminum alloys
- Metal matrix composites (ceramic aluminum alloys)
- Carbon fiber reinforced plastic
- Tungsten carbide
- Platinum
- High temperature plastics
- Glass reinforced epoxy
sp3 Diamond Technologies' DiaTips™ are available as insert tips or as a custom tip applied to customer-supplied carbide inserts and cartridges (see DiaPak™). DiaTips™ are fabricated from a stand-alone sheet of thick film diamond, which is grown in a DC torch CVD reactor. Typical films are 500 microns thick but can be up to 1 mm. The diamond sheets are then laser cut into DiaTips™.
For additional information, Contact us.
DiaPak™ - CARBIDE-BACKED TIPS FOR INSERTS & CARTIDGES
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DiaPak™ brings sp3 Diamond Technologies' industry-leading DiaTip™ diamond tool tips to customers in a ready to mount package, facilitating customer incorporation of diamond and enabling a faster time to market.
DiaPaks™ are pure DiaTip™ diamond tool tips, vacuum-brazed to carbide backings and ready for customer mounting to pocketed carbide inserts, steel cartridges, and still tip holders.
DiaPak™ fabrication
A stand-alone sheet of pure CVD diamond is grown in a chemical vapor deposition reactor. The sheets are polished to a typical thickness of .020 in (500 microns). The diamond sheets are laser cut into DiaTips™, which are then vacuum brazed to carbide backings to form DiaPaks™. The DiaPaks™ may then be mounted on carbide inserts, steel cartridges or steel tool tips using conventional atmospheric brazing.
DiaPak™ sizes and shapes available
DiaTip™ carbide-backed DiaPaks™ are 0.040 in. (1 mm) thick. They can be brazed to carbide inserts, steel cartridges and steel tip holders using conventional induction brazing.
Standard DiaPak™ configurations
35-degree triangle with 5.0mm leg length
55-degree triangle with 4.0mm leg length
55-degree triangle with 5.0mm leg length
60-degree triangle with 4.0mm leg length
60-degree triangle with 5.0mm leg length
60-degree triangle with 7.0mm leg length
80-degree triangle with 3.0mm leg length
80-degree triangle with 4.0mm leg length
80-degree triangle with 5.0mm leg length
80-degree triangle with 6.5mm leg length
90-degree triangle with 4.0mm leg length
90-degree triangle with 5.0mm leg length
90-degree triangle with 6.5mm leg length
90-degree triangle with 7.5mm leg length
Custom sizes and shapes can be supplied in 3 to 4 weeks with a minimum order of 100 pieces.
For additional information, Contact us.
DiaDress™ - DRESSER BARS
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With DiaDress™, sp3 Diamond Technologies offers the highest quality polycrystalline CVD diamond available, suitable for single point, blade type and roller type dressers.
DiaDress™ CVD diamond is harder and more wear resistant for dresser application, meaning it offers a longer life than competitive products. Composed of pure diamond with no binders, DiaDress™ is chemically inert, and offers a higher thermal conductivity which translates to lower cutting temperatures. Because of the unique properties of CVD diamond, DiaDress™ maintains a sharper edge than monocrystalline diamond in wheel dressing and truing applications, making cutting easier and achieving a dresser resistance lower by a factor of two.
DiaDress™ CVD diamond dresser bars ('logs') are available in a large variety of shapes and sizes. Bars for single point and blade type dressers are available from 0.2 mm square to 1.0 mm square and in lengths from 3 mm to 8 mm long. Bars for roller dresser applications are available from 0.2 mm square to 0.8 mm square and in lengths from 1 mm to 5 mm. Special sizes and shapes can be custom manufactured by sp3.
For additional information, Contact us.
DiaMatch™ - HEAT SPREADERS
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sp3's DiaMatch™ heat spreader technology solves several technical challenges to deliver the high heat spreading and CTE matching required for reliable semiconductor and laser packaging.
Semiconductor devices require packaging with high thermal conductivity to prevent overheating and to maintain useful operation of the device. Existing materials generally deliver good thermal characteristics but poor CTE matching, or are well-matched to most semiconductor materials, but do not offer high enough thermal conductivity for today's devices. sp3's DiaMatch™ technology bridges this gap by offering variable CTE-matching, copper-level thermal conductivity, a choice of conductive or insulating die attach surfaces, precise edges and no compositional variability from point to point in the material.
sp3's new patents detail a multilayered structure of thin diamond layers and high thermal conductivity metal layers and the methods of making the structure. The multilayered structure has a variable CTE, which depends on the various layer thicknesses and can be different on each side. This allows the structure to safely bond to common semiconductor materials such as silicon, silicon carbide, gallium arsenide, and gallium nitride while providing the thermal management benefits of diamond.
For additional information, Contact us.
DiaTherm™ - HEAT SPREADERS
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sp3's DiaTherm™ heat spreaders offer device-level thermal management with their exceptionally high thermal diffusivity and conductivity. sp3's CVD deposition technology allows cost-effective incorporation of DiaTherm™ into temperature critical packages.
In recent years, sp3 has made major advances in diamond deposition technology, which has dramatically lowered the cost of CVD diamond. For this reason, cost need not be a deterrent to applying diamond, with its superlative heat dissipation capabilities.
DiaTherm™ diamond heat spreaders maximize emitter power and lifetime. Heat spreaders operate by rapidly removing heat generated by optoelectronic device emitters through thermal conduction to a heat sink. The heat spreader also spreads the heat from the smaller area of the chip to the larger heat sink. In optoelectronic applications, the effectiveness of the heat spreader is critical, because device performance is dependent upon the junction temperature on the chip. Lower and consistent junction temperature results in better performance, such as emitted light wavelength and conversion efficiency, as well as a longer lifetime.
Available as bare, free-standing diamond segments, or in metallized form, sp3's DiaTherm™ heat spreaders are laser cut from sheets of pure diamond formed by chemical vapor deposition in DC torch reactors. DiaTherm™ is 100 percent polycrystalline diamond with a density of 3.5 g/cm3. Typical electric resistivity is 1015 ohms/cm, and the material achieves a thermal conductivity of up to 1400 W/m°k. In addition to its heat conductivity, insulating properties and ability to be machined to tight tolerances, diamond is a passive heat spreader consuming no power.
DiaTherm Sample Request
SOD - SILICON-ON-DIAMOND
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sp3 Diamond Technologies' Silicon-on-Diamond (SOD) extends the company's leadership in implementing diamond for micro and nanofabrication. SOD wafers provide a new level of thermal management in the semiconductor industry, and are only possible thanks to sp3 Diamond Technologies' CVD reactor technology.
sp3 Diamond Technologies' SOD process is leading to a commercial scalability that is very difficult to achieve with other substrates, such as silicon carbide. In Silicon-on-Diamond wafers, a thin layer of silicon is applied on top of the diamond layer. This provides a known interface, silicon, to the device maker. SOD is particularly helpful to companies that are developing III-V devices on silicon. Since the thin layer of silicon has minimal impact on thermal conductivity, the device manufacturer is able to work with a known interface on a high thermally conductive substrate.
The 2005 International Technology Roadmap for Semiconductors (ITRS) has identified SOD as a notable materials-based thermal management approach. Traditional wafer scale materials, such as silicon (Si) or Silicon-on-Insulator (SOI), can be a major bottleneck for thermal management of junction temperature in advanced electronic devices. sp3 identified the value diamond could bring to semiconductor manufacturing, and productized diamond for this application in SOD. SOD has been demonstrated to reduce junction temperatures due to increased thermal conductivity, and to offer lower current leakage similar to alternative substrates, such as SOI.
sp3 Diamond Technologies' Model 655 hot filament diamond deposition system provides uniform diamond growth over areas up to 320 mm by 320 mm. On top of the diamond layer, a thin layer of silicon is applied. Using this system, sp3 offers Silicon-on-Diamond wafers, coated to a variety of specifications.
sp3 has been developing Silicon-on-Diamond wafers for high power GaN devices. sp3's SOD substrates are aimed at significantly reducing the cost of high power GaN substrates, such as Silicon Carbide or native GaN, by providing a wafer scaling path that leverages standard silicon wafer processes. Additionally, sp3's SOD wafers provide a significantly improved thermal path that will allow even higher power GaN circuits to be designed and cost-effectively manufactured.
sp3 is currently developing 100 mm SOD substrates, but has demonstrated thin-film CVD diamond growth on silicon wafers as large as 300 mm. This means that, while the current application focus is on GaN devices, the SOD technology is capable of addressing any circuit design that is based on a silicon platform.
For additional information, Contact us.
DOS - DIAMOND-ON-SILICON
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sp3 Diamond Technologies' market-leading wafer scale diamond solution - Diamond-on-Silicon (DOS) - makes it the only company able to offer uniform deposition of diamond on wafers of all sizes, up to and including 300 mm. DOS leaves an exposed diamond surface for device developers, whether for active circuits or MEMS.
DOS is a critical new technology for device manufacturers increasingly struggling with materials for next generation devices, because diamond has been demonstrated to be both highly viable and cost effective for use in semiconductor manufacturing. The benefits of diamond enable many new micro and nanofabrication applications, including MEMS and traditional III-V devices, while its thermal conductivity and ability to be metalized also make it an ideal material for silicon semiconductor devices.
The sp3 Model 655 hot filament diamond deposition system provides uniform diamond growth over areas up to 350 mm by 375 mm. Using this system, sp3 offers DOS wafers, coated to a variety of specifications. sp3's diamond-on-silicon is available to customers via its foundry service for customer-supplied wafers.
The company also sells standard DOS wafers with various diamond grain characteristics and film thicknesses. These wafers can have microcrystalline or nanocrystalline films, and can be doped or undoped. The range of films available enables multiple applications to take advantage of the superior characteristics of diamond films. Since the DOS wafers are fabricated in a large area, hot-filament CVD deposition reactor, the process is commercially scalable from the start.
For additional information, Contact us.
DEPOSITION EQUIPMENT: MODEL 655 & MODEL 665
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There are many reasons to use diamond as a material across multiple applications, and sp3 Diamond Technologies' proprietary hot filament CVD reactor technology allows us and our customers to deposit diamond successfully across a wide variety of substrates.
You do Diamond...
sp3 Diamond Technologies' proprietary Model 655 and Model 665 Series Hot Filament CVD Reactors provide the foundation for our market leadership. No other company brings to market both the tools for diamond deposition and the widest variety of CVD diamond products available. Understanding how to economically manufacture CVD diamond allows sp3 to work with customers to fully understand and exploit its potential.
With over 19 years of experience in diamond deposition, we have gone through the manufacturing and material preparation learning curve that has allowed us to optimize our technology. Based on that experience, we are able to offer the Model 655 and Model 665 Series reactors as performance-enhancing CVD diamond systems for a number of applications. sp3 has the experience to help you successfully add CVD diamond film manufacturing into your production flow.
The Model 655 and Model 665 Series Hot Filament CVD Reactors offer the industry-leading solution for manufacturing nano- or micro-crystalline diamond films. The systems’ integrated process controller provides precise and repeatable diamond deposition in both R&D and production applications.
Model 655 and Model 665 Series CVD Diamond Deposition Systems combine proven hot-filament reactor technology with advanced controls to produce superior polycrystalline diamond coatings. A multi-step (up to 58 discrete steps), recipe-driven controller ensures repeatable coatings with optimum characteristics in production, as well as a high degree of flexibility for developing coatings.
The proprietary (patented) filament assembly generates uniform energy distribution, operating at filament temperatures up to 2550°C and power levels up to 20W/cm². The deposition process is controlled by thermal management of both filament and substrate temperatures, in conjunction with closed-loop pressure and gas flow control.
The gas distribution assembly allows control of the gas flow patterns in and around both the filament assembly and the substrates to optimize deposition rates, as well as coating uniformity and quality. Adequate space is provided in the deposition chamber to avoid undesirable gas recombination at the chamber walls.
Changes in process step parameters and step times can be utilized to alter nucleation density, growth rate, grain size and other characteristics to produce coatings with markedly different morphology. Small-grain coatings can be produced for finish applications or wear surfaces. Large-grain, thick coatings can be produced for rough cutting or long-life tool applications. No hardware or software modifications are required to switch from one type of coating to another, merely the selection of a different recipe. Each process can be tailored to provide the optimum coating for a given application, and this coating can be reproduced again and again.
The Model 655 and Model 665 Series offer:
Excellent diamond thickness uniformity
- ±10% over a 300 mm wafer
- Accommodates demanding applications
High throughput
- Broad deposition area (350 mm x 375 mm)
- Large chamber size
- Deposition rate up to 1.1 microns/hour
- Fast turnaround
Wide range of 2D and 3D applications
- Flexible filament configuration
- Variable internal fixturing
Consistent performance
- Exceptional process repeatability
Precise process control
- Diamond coating morphology easily tuned for desired performance
Low cost operation
- Less than 0.4kwh power consumption per cubic mm of diamond deposited
- High uptime >95%
- MTBF greater than 500 hours
Precise control of the diamond film
Precise process controls can produce ultra-smooth, nano-crystalline diamond coatings or rougher micro-crystalline structures. Film thickness can be controlled from 1000 angstroms to 50 microns. Grain size can be controlled from less than 10 nanometers to a size equal to film thickness. Other process capabilities include conformal coatings in two or three dimensions and varying levels of adhesion and nucleation density. Graded layer deposition may also be performed by alternating grain sizes in a multi-layer stack. (Patent nos. 6,063,149, 6,319,610, 6,533,831).
Easy to use
A graphical user interface (GUI) enables the operator to quickly view the system process status. All process parameters-temperature, pressure and gas flow values-can be seen at a glance. Highlighted parameters, together with audible and visual indicators, quickly alert the operator to alarm or abort conditions, permitting prompt response. The touch-screen display provides easy access to menus and primary operational control functions. More involved engineering and maintenance functions are accessed via dedicated menus in a Windows format. A Control Screen enables manual control of process variables for authorized personnel.
Fast creation and editing of process recipes
A Recipe Manager facilitates creation of new process recipes and quick, easy editing of existing recipes. Recipes with up to 58 discrete process steps can be created. Parametric control of all process variables is achieved through assignment of applicable setpoints and digital inputs at each process step. Limits can be programmed to initiate alarm and abort commands on key process parameters. Recipes can be stored within production and engineering folders, with multi-level access control via a tiered security system. Remote recipe management is provided by a stand-alone application and remote computer/network connection via an Ethernet port.
Complete process run histories can be maintained
Run process data is recorded at user-programmable intervals to assist with process development, routine maintenance and troubleshooting tasks. This data is logged to yield a permanent record for future reference. All key process parameters, digital I/O states and events for the current recipe are easily viewed through the data display. A separate event log makes it convenient to view a summary of run step changes for an entire process run. In addition, a stand-alone data viewer affords review and export of process data history files.
Real-time control of process variables
The process control module permits real-time control of all key process variables. In addition to assuring run-to-run repeatability in a production mode, this facilitates process development and optimization of variables to achieve performance objectives. Programmable alarm and abort levels can be set to prevent deviation outside of set limits, and thereby prevent material scrap. Hardware safety features and interlocks protect the equipment and operating personnel.
Options for sp3 Model 655 and Model 665 Series Diamond Coating System include:
- Planar array package - for flat substrates, which require a coating on one planar surface.
- Silicon wafer package - for coating wafers; specify 100 mm, 150 mm, 200 mm or 300 mm.
- Substrate cooling package - for controlling backside wafer temperature.
- Three-dimensional array package - for applications and substrates that require coating in more than one plane.
- Flat cutting tool package - for use on all tungsten carbide inserts, grooving tools, engravers, etc.
- Round cutting tool package - for coating drills, endmills, countersinks, routers and other rotating tungsten carbide tools.
Click here for sp3's paper on sp3's experience using Hot Filament CVD Reactors to grow diamond for an expanding set of applications.
These products are covered by one or more U.S. patents or patent applications. See http://www.sp3diamondtech.com/comp_patents.asp for details.
You do Diamond...
There are more than 35 sp3 CVD thin-film diamond deposition reactors in the field today, with an increasing interest in the tool, the technology and the material. The Model 655 and 665 Series provides you with the premier thin-film, wide-area diamond deposition technology on the market, and is available through our sales distributors listed below. For more information on how you can start to make diamond thin-film for your own application, please contact:
Cornes Technologies USA
780 Montague Expressway, Suite 506
San Jose, CA 95131-1319
Tel: +1-408-520-4555
Fax: +1-408-520-4551
Email: bjohnson@cornestech.com
Or visit www.sekidiamond.com
Cornes Technologies Limited
Cornes House, 5-1 Shiba 3-chome, Minato-ku
Tokyo 105-0014, Japan
Tel: 81-3-5427-7550
Fax: 81-3-5427-7570
Or visit www.cornestech.co.jp
Greenspec, Inc. (Republic of Korea)
90-4, Galgot-ri, Jinwi-myeon, Pyeongtaek-si, Gyeonggi-do
South Korea, 451-862
Tel: +1 82-31-647-6550
Fax: +1 82-31-647-6551
Email: khlee@greenspec.co.kr
www.greenspec.co.kr
Techmart Industrial Limited (China, Taiwan, Hong Kong)
Unit B,6/F, Howard Factory Building
66 Tsun Yip Str.
Kwun Tong, Kln, Hong Kong.
Tel: 852 2341 1180
Fax: 852 8169 8215
Email: davidkwok@techmart.com.hk
www.techmart.com.hk