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  sp3 Diamond Technologies is a leader in developing diamond for use in mainstream semiconductor manufacturing. Wafer scale diamond (as available in our Silicon-on-Diamond and Diamond-on-Silicon products) offers enhanced mechanical material properties, such as significantly higher stiffness, strength, hardness, thermal conductivity and chemical robustness, over silicon and most other thin-film materials commonly used in microfabrication technologies.
sp3's diamond coatings are finding increasing use in electronic applications because of the high thermal conductivity of diamond (10x that of silicon). Coatings up to 25 microns thick on 300 mm silicon wafers provide excellent heat spreading at the chip level. Silicon-diamond-silicon wafers have been used successfully as base wafers for gallium nitride growth. Nanocrystalline diamond coatings are being used in MEMS applications. Diamond coatings also provide electrical insulation, but can be doped for electrical conductivity if needed. Depositing diamond material as close to the heat generating junctions as is possible results in a structure where the thermal conductivity of the diamond layer immediately spreads heat away from the junction and reduces junction temperatures, or correspondingly allows operation at much higher speeds and power levels for the same junction temperature. Diamond substrates can be used directly for silicon devices, MEMS devices or can be used as starting substrates for compound semiconductor layers such as GaN, which can be grown on silicon using metal-organic chemical vapor deposition (MOCVD) techniques. sp3 Diamond Technologies' proprietary hot filament diamond deposition systems are widely used to produce highly uniform diamond films on silicon wafers ranging from 50 mm to 300 mm. The chamber accommodates nine 100 mm wafers, four 150 mm wafers, two 200 mm wafers or one 300 mm wafer. Coatings are of high quality, with a uniformity within ±10% over the entire wafer surface.
For more information on sp3 products and services for semiconductor-related applications, please see:  |
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