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  Micro-electro-mechanical systems (MEMS) have design needs that offer a compelling case for the adoption of diamond as a base material. sp3 Diamond Technologies can provide wafer-scale diamond films for research and development to incorporate diamond into MEMS. This capability is provided directly, or through processes available from the MEMS and Nano-Technology Exchange.
Diamond's properties make it ideal for use in MEMS devices, because it can address both thermal and mechanical management issues. The high thermal conductivity of diamond enables thin-film diamond coatings to be used in MEMS, photonic and microelectronic devices for improved thermal management. The high Young's modulus of diamond allows the operational frequency of MEMS RF resonators to be pushed into the GHz frequency bands. Because of diamond's hardness, thin-film diamond may protect MEMS and nanodevices against surface wear. Its high lubricity will contribute to low stiction. Additionally, diamond's low coefficient of thermal expansion (CTE) provides an increased thermal stability over current silicon approaches. This is extremely important as MEMS resonators try to move into critical timing applications. Implementing diamond in a MEMS design further enhances the longevity and functionality of these devices, as the micromechanical elements wear less, with better thermal management for the microelectronic components. MEMS devices are easily realizable using standard lithography and the ability of CVD diamond structures to be fabricated using standard reactive ion etch (RIE) processes. MEMS and Nanotechnology Exchange Highlighting our leadership in this emerging field, sp3 has incorporated our diamond-on-silicon (DOS) foundry service into processes offered by the MEMS and Nanotechnology Exchange. This provides MEMS and Nanotechnology developers with easy access to sp3's proprietary CVD diamond films and to the thermal, mechanical and wear benefits of diamond in concert with the other process steps of their designs. The MEMS and Nanotechnology Exchange is the nation's leading provider of high-quality foundry and consulting services. Its 54, individual state-of-the-art foundries collectively offer the most comprehensive and diverse set of implementation solutions for MEMS, micro- and nano-technologies to be found anywhere in the world. The MEMS and Nanotechnology Exchange customer list includes nearly 600 organizations around the country including multinational corporations, small start-ups, leading academic research institutions and government facilities.
For more information on sp3 products and services for MEMS-related applications, please see:  |
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